Local oxidation induced by inhomogeneous stress on the blistered Si surface

Igarashi, Shinichi*; Itakura, Akiko*; Kitajima, Masahiro*; Nakano, Shinsuke*; Muto, Shunsuke*; Tanabe, Tetsuo*; Yamamoto, Hiroyuki; Hojo, Kiichi

Hyomen Kagaku, 25(9), p.562 - 567, 2004/09

https://doi.org/10.1380/jsssj.25.562

Surface stress can be utilized positively in modifying the surface reaction potential and increasing the surface reactivity. Blister is a local protrusion of solid surface induced by gas ion irradiation, and is considered to create local stress on surface layers. Si(100) substrate was irradiated with 10 keV H (fluence; 110 ions/m) at an angle of 30 to the surface normal. The blisters of several m in diameter at the bottom were formed. After the ion irradiation, the substrate was oxidized. By means of scanning Auger microscopy, we observed that the rims of the blisters have higher oxygen intensities than the flat surfaces and the tops have lower than the flats. The calculated stress distribution of the blister shows that the surface layers should be stretched laterally at the top of blisters and are compressed at the rim, relative to the flat surfaces. The O distribution clearly consists with the stress distribution of the surface. Our results demonstrate a patterned oxidation of Si surface applying its reactivity depending on the surface stress.

Helium ion irradiation onto chemically deposited molybdenum on carbide

; *; *

Journal of Nuclear Materials, 113, p.202 - 206, 1983/00

https://doi.org/10.1016/0022-3115(83)90143-5

no abstracts in English

Surface erosions by energetic helium and hydrogen bombardment of molybdenum and pyrolytic graphite

; ; ; ; ; ; Murakami, Yoshio

Proc.7th Intern.Vac.Congr.and 3rd Intern.Conf.Solid Surfaces, Vienna, p.375 - 378, 1977/09

no abstracts in English

Observation of Blister in Molybdenum Surface Arion Irradiated at Ambient Temperature

; ; Shiraishi, K.

JAERI-M 6585, 25 Pages, 1976/06

JAERI-M-6585.pdf:1.51MB

no abstracts in English